Chunadra, А.G.; Sereda, К.N.; Tarasov, I.K.; Makhlai, V.A.; Kozhukhovskyi, B.M.
(Problems of Atomic Science and Technology, 2022)
Paper presents results of evaluation of the influence of the parameters of the additional anode electromagnetic trap for discharge electrons in a magnetron sputtering system. The efficiency of ionization processes is also ...