Bizyukov, A.A.; Kashaba, A.Ye.; Romashchenko, E.V.; Sereda, K.N.; Tarasov, I.K.; Abolmasov, S.N.
(Вопросы атомной науки и техники, 2005)
The high-current pulsed magnetron sputtering system is presented and its operation regimes are studied. The comparative technological trials of the system are carried out at various types of the discharge: stationary ...