Vasin, A.V.; Ishikawa, Y.; Rusavsky, A.V.; Nazarov, A.N.; Konchitz, A.A.; Lysenko, V.S.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2015)
Near-stochiometric and carbon-rich a-Si₁₋xCx:H thin films were deposited using the magnetron sputtering of Si target in Ar/CH₄ gas mixture. As-deposited nearstochimetric (x = 0.5) sample showed weak blue photoluminescence ...