Kolouch, A.; Horáková, M.; Hájková, P.; Heyduková, E.; Exnar, P.; Spatenka, P.
(Вопросы атомной науки и техники, 2006)
TiO₂ thin films were prepared by PECVD technique from vapors of Titanium-IV iso-propoxide mixed with oxygen
at different temperatures. The films were deposited on substrates with system of special platinum electrodes and ...