Haccart, T.; Cattan, E.; Remiens, D.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2002)
Lead titanate zirconate Pb(Zr,Ti)O₃ (PZT) thin films were deposited on platinized silicon substrates by r.f. magnetron sputtering and crystallized with preferred (110) or (111) orientation by conventional annealing treatment. ...