Vyrovets, I.I.; Gritsyna, V.I.; Dudnik, S.F.; Opalev, O.A.; Reshetnyak, E.N.; Strel'nitskiy, V.E.
(Functional Materials, 2009)
Diamond films of up to 12 μm thickness have been deposited onto single crystal silicon substrates by CVD method in CH₄/H₂/Ar glow discharge plasma stabilized by magnetic field. X-ray diffraction analysis and atomic force ...