Ahadi, Amir Mohammad; Strunskus, Thomas; Polonskyi, Oleksandr; Trottenberg, Thomas; Kersten, Holger; Faupel, Franz
(Вопросы атомной науки и техники, 2016)
A gas aggregation system combined with a magnetron discharge is used to produce nanoparticles (NPs) from
metal targets. Here, we presents an overview of the role of different parameters in the TiOx NP synthesis and
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