Goncharov, A.A.; Dobrovolskii, A.M.; Pavlov, S.N.; Panchenko, O.A.; Protsenko, I.M.
(Вопросы атомной науки и техники, 2000)
Now the technologies of functional covers deriving on large surfaces intensively are developed. For these purposes the plasma sputtering systems of magnetron, vacuum - arc, electron -beam and other types are effectively ...