Devizenko, A.Yu.; Kopylets, I.A.; Kondratenko, V.V.; Pershyn, Y.P.; Devizenko, I.Y.; Zubarev, E.N.; Savitskiy, B.A.
(Functional Materials, 2018)
The structure, construction and mechanical stresses of the TaSi₂/Si multilayer manufactured by magnetron sputtering on the heated substrates were studied in the initial state and after thermal annealing. Deposition of ...