Denbnovetskiy, S.V.; Melnyk, V.I.; Melnyk, I.V.; Tugay, B.A.; Porytskyy, P.V.
(Вопросы атомной науки и техники, 2007)
Investigations of simultaneous applying of high voltage glow discharge (HVGD) and non-self-maintained low-pressure arc discharge for obtaining high-quality titanium nitride coatings are provided. Obtained results are ...