Afanasіeva, I.A.; Afanasiev, S.N.; Azarenkov, N.A.; Bobkov, V.V.; Gritsyna, V.V.; Logachev, Yu.E.; Okseniuk, I.I.; Skrypnyk, A.A.; Shevchenko, D.I.; Chornous, V.M.
(Вопросы атомной науки и техники, 2019)
To solve the actual problem of the analysis of the sputtered particles radiation during coating deposition in a magnetron sputtering system, a digital technique was proposed for processing the emission spectra of the ...