Sobol’, O.V.; Andreev, A.A.; Stolbovoy, V.A.; Gorban’, V.F.; Pinchuk, N.V.; Meylekhov, A.A.
(Вопросы атомной науки и техники, 2015)
ZrN-phase coatings with a cubic lattice (NaCl structure type) were produced by the method of vacuum-arc evaporation of a Zr cathode in nitrogen atmosphere at pressures PN between 0.02 and 0.64 Pa. The pressure increase at ...