Burmaka, G.P.; Denysenko, I.B.; Azarenkov, N.A.
(Вопросы атомной науки и техники, 2015)
The growth of forest of single-walled carbon nanotubes (SWCNTs) in plasma-enhanced chemical vapor deposition (PECVD) is studied using a deposition model. The inhomogeneity in deposition of neutrals from plasma on the SWCNTs, ...