Azarenkov, N.A.; Bizyukov, A.A.; Sereda, K.N.; Tseluyko, A.Ph.; Yunakov, N.N.; Gapon, A.V.; Kashaba, A.Y.
(Вопросы атомной науки и техники, 2002)
A surface wave plasma source for the production of a large-diameter, high electron density and low electron temperature plasma at low pressure without using a magnetic field for plasma processing and thin film preparation ...