Bogdanov, S.E.; Beddies, G.; Daniel, M.; Makogon, Yu.N.
(Наносистеми, наноматеріали, нанотехнології, 2013)
Two methods of creation of the TiSi₂(C54) stable phase are reviewed, and their comparison is considered. The formation of the structure of TiSi₂(C54) nanosize films on monocrystalline Si is studied. As shown, the TiSi₂(C54) ...