Dan’ko, V.A.; Indutnyi, I.Z.; Myn’ko, V.I.; Shepeliavyi, P.E.; Lukyanyuk, M.V.; Litvin, O.S.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2012)
The new effect of photostimulated dissolution of as-evaporated and annealed
Ge-based chalcogenide glass (ChG) films was investigated in detail. The etching rate
increases with the illumination intensity, and its spectral ...