Osinsky, V.I.; Masol, I.V.; Lyahova, N.N.; Deminsky, P.V.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2012)
Discussed in this paper are options for replacing the virtual structure of SiC
atoms with AlN compound. The Al₄C₃, AlNC and AlNOC compounds in vapor and solid
epitaxial processes have been obtained as a result of ...