Guglya, A.G.; Marchenko, Yu.A.; Melnikova, E.S.; Vlasov, V.V.; Zubarev, E.N.
(Вопросы атомной науки и техники, 2014)
This scientific paper delves into the findings of the investigation carried out to determine the adsorption and electrophysical characteristics of nanoporous (V, 10 at.% Ti)Nx films obtained using the ion beam-assisted ...