Deryzemlia, A.M.; Kryshtal, P.G.; Malykhin, D.G.; Radchenko, V.I.; Shirokov, B.M.
(Вопросы атомной науки и техники, 2014)
Results of experiments on obtaining nanocrystalline silicon films with the method of stimulated plasma-enhanced chemical vapor deposition (PECVD) into low frequency induction RF discharge (880 kHz) allowed in silicon ...