Fedorchenko, V.D.; Byrka, O.V.; Chebotarev, V.V.; Garkusha, I.E.; Tereshin, V.I.
(Вопросы атомной науки и техники, 2005)
The construction of planar ECR plasma source with multipolar magnetic field is described and the distribution of plasma parameters is measured. Plasma density and electron temperature at the distance 2,5 cm from the magnet ...