Boyko, B.Т.; Khrypunov, G.S.; Yurchenko, G.V.
(Вопросы атомной науки и техники, 2000)
Electrical and optical properties of ZnO:Al films deposited on unheated glass substrate by non-reactive RF magnetron sputtering of target ZnO:Al₂O₃ (98/2 wt.%) were studied. It was shown that Zno:Al films with the thickness ...