Pugatch, V.M.; Perevertaylo, V.L.; Fedorovich, O.A.; Borisenko, A.G.; Kostin, E.G.; Kruglenko, M.P.; Polozov, B.P.; Tarasenko, L.I.
(Вопросы атомной науки и техники, 2007)
The manufacturing of elements of micro-strip metal detectors (MSMD) for ionizing radiation applying plasma-chemistry technologies for etching of multilayer structures is described in details. Results obtained by using ...