Walkowicz, J.; Zykov, A.V.; Dudin, S.V.; Yakovin, S.D.
(Вопросы атомной науки и техники, 2007)
The investigation results of the DC magnetron sputtering system for synthesis of high-quality oxide coatings are presented. In the system oxygen, activated by an independent Inductively-Coupled Plasma (ICP) source, is ...