Dobrovol's'kii, A.M.; Evsyukov, A.N.; Goncharov, A.A.; Protsenko, I.M.
(Вопросы атомной науки и техники, 2007)
The operation of any magnetron-type sputtering system is based on using of anomalous glow discharge in a crossed E ┴ B fields. In such systems a principle of magnetic isolation of electrons is realized and idea of magnetic ...