Astakhov, O.; Finger, F.; Carius, R.; Lambertz, A.; Neklyudov, I.; Petrusenko, Yu.; Borysenko, V.; Barankov, D.
(Вопросы атомной науки и техники, 2007)
Amorphous and microcrystalline silicon are well known materials for thin film large area electronics. The defects in the material are an important issue for the device quality and the manufacturing process optimization. ...