Yakovin, S.; Dudin, S.; Zykov, A.; Shyshkov, A.; Farenik, V.
(Вопросы атомной науки и техники, 2012)
In the present paper the results of technological approbation of the integral cluster set-up for synthesis of various types of high-quality coatings such as Al₂O₃, TiO₂, ZrO₂, AlN, TiN, and others with coating thickness ...