Перегляд Bопросы атомной науки и техники, 2012 за автором "Lisovskiy, V.A."

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Axial structure of DC glow discharge negative glow in nitrogen

Lisovskiy, V.A.; Derevyanko, V.A.; Kravchenko, E.A.; Yegorenkov, V.D. (Вопросы атомной науки и техники, 2012)

We registered axial profiles of electron temperature, plasma potential and concentration of the direct current glow discharge in nitrogen at different gas pressure and discharge current values. We observed that in a broad ...
Dependence of RF breakdown curve on electrode geometry in CCP reactor

Dudin, S.V.; Dakhov, A.N.; Lisovskiy, V.A.; Pletniov, V.M. (Вопросы атомной науки и техники, 2012)

The results of experimental and theoretical study of RF capacitively coupled discharge breakdown in reactor for reactive ion etching of semiconductors are presented. Taking into account complex geometry of the reactor with ...

Результати 1-2 з 2

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