Bizyukov, A.A.; Bizyukov, I.A.; Girka, O.I.; Sereda, K.N.; Sleptsov, V.V.; Gutkin, M.; Mishin, S.
(Вопросы атомной науки и техники, 2011)
This paper concerns with investigation of the trimming process which uses ion beam etching for high-precision
adjustment of the thickness of functional microelectronics layers. The layer deposited on the substrate is ...