Aksyonov, D.S.; Aksenov, I.I.; Luchaninov, A.A.; Reshetnyak, E.N.; Strel’nitskij, V.E.
(Вопросы атомной науки и техники, 2009)
Synthesis of Ti-Si and Ti-Si-N coatings using a filtered vacuum-arc plasma source with consumable titaniumsilicon
cathode was investigated. The thickness of films and their elemental composition were defined by means ...