Valinčius, V.; Valatkevičius, P.; Grigaitienė, V.; Marcinauskas, L.; Milieška, M.
(Вопросы атомной науки и техники, 2008)
Present study offers the technology for production of small uniform particles and coatings by employment of nonequilibrium plasma at atmospheric pressure. A new process has been developed for a high rate plasma deposition ...