Наукова електронна бібліотека
періодичних видань НАН України

Перегляд Вопросы атомной науки и техники за автором "Farenik, V."

Репозиторій DSpace/Manakin

Перегляд Вопросы атомной науки и техники за автором "Farenik, V."

Сортувати за: Порядок: Результатів:

  • Double magnetron cluster set-up for synthesis of micro and nano structure coatings 
    Yakovin, S.; Zykov, A.; Dudin, S.; Sergiec, M.; Farenik, V. (Вопросы атомной науки и техники, 2015)
    In the present paper, the results studying the technological regimes of reactive magnetron sputtering in cluster set-up with two planar magnetrons, plasma source and medium energy ion source are presented. Magnetron ...
  • Plasma assisted deposition of TaB₂ coatings by magnetron sputtering system 
    Yakovin, S.; Zykov, A.; Dudin, S.; Farenik, V.; Goncharov, A.; Shelest, I.; Kuznetsov, V. (Вопросы атомной науки и техники, 2017)
    In the present paper the results of TaB₂ coating deposition in cluster set-up comprising a low pressure planar magnetron and an inductive plasma source are presented. The system allows to control independently the fluxes ...
  • Technological aprobation of integral cluster setup for complex compound composites syntesis 
    Yakovin, S.; Dudin, S.; Zykov, A.; Shyshkov, A.; Farenik, V. (Вопросы атомной науки и техники, 2012)
    In the present paper the results of technological approbation of the integral cluster set-up for synthesis of various types of high-quality coatings such as Al₂O₃, TiO₂, ZrO₂, AlN, TiN, and others with coating thickness ...

Пошук


Розширений пошук

Перегляд

Мій обліковий запис