At present study the result of development and investigations of cluster technological set-up for synthesis of complex compound composites is demonstrated. The present set-up consist of complimentary DC-magnetron ...

The investigation results of the DC magnetron sputtering system for synthesis of high-quality oxide coatings are presented. In the system oxygen, activated by an independent Inductively-Coupled Plasma (ICP) source, is ...

The present paper clarifies the conditions under which the process of plasma sterilization of medical tools may be efficiently performed in the RF capacitive gas discharge of low pressure in air. Experiments were performed ...