Chunadra, А.G.; Sereda, К.N.; Tarasov, I.K.; Makhlai, V.A.
(Вопросы атомной науки и техники, 2021)
This work is devoted to measuring the function of the distribution of charged particles of gas-discharge plasma in a magnetron sputtering system under conditions of non-potential “earth”. Measurements are carried out with ...