Yakovin, S.; Zykov, A.; Dudin, S.; Farenik, V.; Goncharov, A.; Shelest, I.; Kuznetsov, V.
(Вопросы атомной науки и техники, 2017)
In the present paper the results of TaB₂ coating deposition in cluster set-up comprising a low pressure planar magnetron and an inductive plasma source are presented. The system allows to control independently the fluxes ...