Belyaeva, A.I.; Galuza, A.A.; Grebennik, T.G.; Yuriyev, V.P.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 1999)
A multiple angle ellipsometric method is used for measurements of thin film layers on substrates. The method evaluates fundamental optical constants and thicknesses of the film layers. Dielectric functions of the surface ...