Перегляд за автором "Zykov, A."

Сортувати за: Порядок: Результатів:

  • Jamirzoev, A.; Yakovin, S.; Zykov, A. (Вопросы атомной науки и техники, 2013)
    In the present study the characteristics of discharge in crossed EH fields in acceleration and plasma regimes have been researched at low voltages near the breakdown curve. The new experimental data for current-voltage ...
  • Dudin, S.; Tkachenko, O.; Shchybria, A.; Yakovin, S.; Zykov, A.; Yefymenko, N. (Вопросы атомной науки и техники, 2018)
    The design and characteristics of a new combined magnetron-ion-beam sputtering system are presented. The system allows coating deposition both by means of magnetron discharge, and by sputtering of complex composite targets ...
  • Yakovin, S.; Zykov, A.; Dudin, S.; Sergiec, M.; Farenik, V. (Вопросы атомной науки и техники, 2015)
    In the present paper, the results studying the technological regimes of reactive magnetron sputtering in cluster set-up with two planar magnetrons, plasma source and medium energy ion source are presented. Magnetron ...
  • Jamirzoev, A.; Yakovin, S.; Zykov, A. (Вопросы атомной науки и техники, 2015)
    The characteristics of the low pressure discharge in crossed electric and magnetic fields is described in this work for the case of magnetically insulated diode and electron anode layer with free cathode boundary. The ...
  • Yakovin, S.; Zykov, A.; Dudin, S.; Farenik, V.; Goncharov, A.; Shelest, I.; Kuznetsov, V. (Вопросы атомной науки и техники, 2017)
    In the present paper the results of TaB₂ coating deposition in cluster set-up comprising a low pressure planar magnetron and an inductive plasma source are presented. The system allows to control independently the fluxes ...
  • Dubovik, A.; Fedorov, A.; Katrunov, K.; Lebedynskiy, A.; Onischenko, G.; Yakovin, S.; Zykov, A. (Functional Materials, 2012)
    ZnWO₄ films were deposited on glass and KCI substrates using ion beam sputtering of ZnWO₄ target. After annealing in O₂ flow at 773 K during 7 hours, films gain the crystalline structure and luminescent properties which ...
  • Yakovin, S.; Zykov, A.; Dudin, S.; Yefymenko, N. (Вопросы атомной науки и техники, 2016)
    The investigation results of optimal conditions for synthesis of thin-film tantalum oxide dielectric coatings using the cluster multipurpose setup are presented. The set-up consist of DC magnetron, ICP source, and ...
  • Yakovin, S.; Dudin, S.; Zykov, A.; Shyshkov, A.; Farenik, V. (Вопросы атомной науки и техники, 2012)
    In the present paper the results of technological approbation of the integral cluster set-up for synthesis of various types of high-quality coatings such as Al₂O₃, TiO₂, ZrO₂, AlN, TiN, and others with coating thickness ...