Перегляд за автором "Dudin, S."

Сортувати за: Порядок: Результатів:

  • Dudin, S.; Rafalskyi, D.; Popelier, L.; Aanesland, A. (Физическая инженерия поверхности, 2012)
    In the present paper we compare the positive and negative ion flows created using a recently developed electrostatic grid-type filter with the flows formed using a magnetic filter. Langmuir probe measurements show electron ...
  • Dudin, S.; Tkachenko, O.; Shchybria, A.; Yakovin, S.; Zykov, A.; Yefymenko, N. (Вопросы атомной науки и техники, 2018)
    The design and characteristics of a new combined magnetron-ion-beam sputtering system are presented. The system allows coating deposition both by means of magnetron discharge, and by sputtering of complex composite targets ...
  • Yakovin, S.; Zykov, A.; Dudin, S.; Sergiec, M.; Farenik, V. (Вопросы атомной науки и техники, 2015)
    In the present paper, the results studying the technological regimes of reactive magnetron sputtering in cluster set-up with two planar magnetrons, plasma source and medium energy ion source are presented. Magnetron ...
  • Yakovin, S.; Zykov, A.; Dudin, S.; Farenik, V.; Goncharov, A.; Shelest, I.; Kuznetsov, V. (Вопросы атомной науки и техники, 2017)
    In the present paper the results of TaB₂ coating deposition in cluster set-up comprising a low pressure planar magnetron and an inductive plasma source are presented. The system allows to control independently the fluxes ...
  • Yakovin, S.; Zykov, A.; Dudin, S.; Yefymenko, N. (Вопросы атомной науки и техники, 2016)
    The investigation results of optimal conditions for synthesis of thin-film tantalum oxide dielectric coatings using the cluster multipurpose setup are presented. The set-up consist of DC magnetron, ICP source, and ...
  • Yakovin, S.; Dudin, S.; Zykov, A.; Shyshkov, A.; Farenik, V. (Вопросы атомной науки и техники, 2012)
    In the present paper the results of technological approbation of the integral cluster set-up for synthesis of various types of high-quality coatings such as Al₂O₃, TiO₂, ZrO₂, AlN, TiN, and others with coating thickness ...