Zavaleyev, V.; Walkowicz, J.; Sawczak, M.; Klein, M.; Moszyński, D.; Chodun, R.; Zdunek, K.
(Вопросы атомной науки и техники, 2016)
The paper presents results of studies on the structure of tetrahedral amorphous carbon films (ta-C) with a
thickness in the range from 20 to 280 nm, deposited using pulsed vacuum arc technique with an electromagnetic
...